Makoto , Minakata and Islam, M.S. and Nagano, Shigehiro and Yoneyama, Satoshi and Sugiyama, Tatsuhiko and Awano, Haruyuki (2006) Nanometer size periodic domain inversion in LiNbO3 substrate using circular form full cover electrodes. SOLID-STATE ELECTRONICS, 50 (5). pp. 848-852. ISSN 0038-1101
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We have proposed circular form full cover electrodes (CF-FCE) for nanometer size periodic domain inversion in LiNbO3 (LN) substrate. From the calculated results, circular form electrode is better than that of rectangular type for fine domain inversion patterns. Circular form FCE were fabricated over the photoresist patterned by two-beam laser interference exposure method. Domain inversion was performed by applying high voltage to circular form FCE. Using this technique, we successfully fabricated 2 mu m periodic domain inversion in a 500 mu m-thick congruent LN (C-LN) crystal. It is also shown that smaller domain inversion width in the nanometer regime with high aspect ratio is possible using this technique. We obtained an aspect ratio as high as 870 for a domain inversion width of 575 nm. To our knowledge, such a high aspect ratio is reported for the first time. (c) 2006 Elsevier Ltd. All rights reserved.
|Subjects:||Physical Science > Nanophysics|
Physical Science > Nano objects
Material Science > Nanochemistry
Material Science > Nanostructured materials
|Divisions:||Faculty of Engineering, Science and Mathematics > School of Physics|
Faculty of Engineering, Science and Mathematics > School of Chemistry
|Deposited On:||10 Nov 2010 04:11|
|Last Modified:||10 Nov 2010 04:11|
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