Nano Archive

A Rotating-Tip-Based Mechanical Nano-Manufacturing Process: Nanomilling

Gozen, B. Arda and Ozdoganlar, O. Burak (2010) A Rotating-Tip-Based Mechanical Nano-Manufacturing Process: Nanomilling. Nanoscale Research Letters, 5 (9). pp. 1403-1407.



We present a rotating-tip-based mechanical nanomanufacturing technique, referred to here as nanomilling. An atomic force microscopy (AFM) probe tip that is rotated at high speeds by out-of-phase motions of the axes of a three-axis piezoelectric actuator is used as the nanotool. By circumventing the high-compliance AFM beam and directly attaching the tip onto the piezoelectric actuator, a high-stiffness arrangement is realized. The feeding motions and depth prescription are provided by a nano-positioning stage. It is shown that nanomilling is capable of removing the material in the form of long curled chips, indicating shearing as the dominant material removal mechanism. Feature-size and shape control capabilities of the method are demonstrated.

Item Type:Article
Uncontrolled Keywords:Nanomilling, AFM probe, Nano-manufacturing, Nano-machining
Subjects:Material Science > Nanofabrication processes and tools
Technology > Manufacturing processes for nanotechnology
ID Code:9546
Deposited By:SPI
Deposited On:21 Oct 2010 09:24
Last Modified:21 Oct 2010 09:24

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