Gozen, B. Arda and Ozdoganlar, O. Burak (2010) A Rotating-Tip-Based Mechanical Nano-Manufacturing Process: Nanomilling. Nanoscale Research Letters, 5 (9). pp. 1403-1407.
We present a rotating-tip-based mechanical nanomanufacturing technique, referred to here as nanomilling. An atomic force microscopy (AFM) probe tip that is rotated at high speeds by out-of-phase motions of the axes of a three-axis piezoelectric actuator is used as the nanotool. By circumventing the high-compliance AFM beam and directly attaching the tip onto the piezoelectric actuator, a high-stiffness arrangement is realized. The feeding motions and depth prescription are provided by a nano-positioning stage. It is shown that nanomilling is capable of removing the material in the form of long curled chips, indicating shearing as the dominant material removal mechanism. Feature-size and shape control capabilities of the method are demonstrated.
|Uncontrolled Keywords:||Nanomilling, AFM probe, Nano-manufacturing, Nano-machining|
|Subjects:||Material Science > Nanofabrication processes and tools|
Technology > Manufacturing processes for nanotechnology
|Deposited On:||21 Oct 2010 09:24|
|Last Modified:||21 Oct 2010 09:24|
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