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Calibration of multi-axis MEMS force sensors using the shape-from-motion method

Kim, Keekyoung and Sun, Yu and Voyles, Richard M. and Nelson, Bradley J. (2007) Calibration of multi-axis MEMS force sensors using the shape-from-motion method. IEEE SENSORS JOURNAL, 7 (3-4). pp. 344-351.

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Precise calibration of multi-axis microelectromechanical systems (MEMS) force sensors is difficult for several reasons, including the need to apply many known force vectors at precise orientations at the micro- and nanoNewton (nN) force scales, and the risk of damaging the small, fragile microdevices. To tackle these challenges, this paper introduces the shape-from-motion calibration method. A new design of a two-axis MEMS capacitive force sensor with high linearity and nN resolutions is presented. Structural-electrostatic coupled-field simulations are conducted in order to optimize the sensor design. The designed sensor is calibrated with the shape-from-motion method, the least-squares method as well as the gravity-based method for comparison purposes. Calibration results demonstrate that the shape-from-motion method provides a rapid, practical, and accurate technique for calibrating multi-axis MEMS sensors.

Item Type:Article
Uncontrolled Keywords:calibration; microelectromechanical systems (MEMS) force sensor; multi-axis; shape-from-motion
Subjects:Engineering > Nanotechnology applications in mechanical engineering
Analytical Science > Nanotechnology for sensing and actuating
ID Code:876
Deposited On:05 Dec 2008 13:06
Last Modified:05 Dec 2008 13:13

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