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Fabrication of a Highly Sensitive Chemical Sensor Based on ZnO Nanorod Arrays

Park, Jae Young and Choi, Sun-Woo and Kim, Sang Sub (2009) Fabrication of a Highly Sensitive Chemical Sensor Based on ZnO Nanorod Arrays. Nanoscale Research Letters, 5 (2). pp. 353-359.

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Official URL: http://www.springerlink.com/content/04855772208584...

Abstract

We report a novel method for fabricating a highly sensitive chemical sensor based on a ZnO nanorod array that is epitaxially grown on a Pt-coated Si substrate, with a top–top electrode configuration. To practically test the device, its O2 and NO2 sensing properties were investigated. The gas sensing properties of this type of device suggest that the approach is promising for the fabrication of sensitive and reliable nanorod chemical sensors.

Item Type:Article
Uncontrolled Keywords:ZnO nanorod array - Chemical sensor - MOCVD
Subjects:Material Science > Nanofabrication processes and tools
Analytical Science > Nanotechnology for sensing and actuating
ID Code:8157
Deposited By:Lesley Tobin
Deposited On:17 Feb 2010 16:23
Last Modified:17 Feb 2010 16:23

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