Nano Archive

New Colloidal Lithographic Nanopatterns Fabricated by Combining Pre-Heating and Reactive Ion Etching

Cong, Chunxiao and Junus, William Chandra and Shen, Zexiang and Yu, Ting (2009) New Colloidal Lithographic Nanopatterns Fabricated by Combining Pre-Heating and Reactive Ion Etching. Nanoscale Research Letters, 4 (11). pp. 1324-1328.

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Official URL: http://www.springerlink.com/content/87g17525h15136...

Abstract

We report a low-cost and simple method for fabrication of nonspherical colloidal lithographic nanopatterns with a long-range order by preheating and oxygen reactive ion etching of monolayer and double-layer polystyrene spheres. This strategy allows excellent control of size and morphology of the colloidal particles and expands the applications of the colloidal patterns as templates for preparing ordered functional nanostructure arrays. For the first time, various unique nanostructures with long-range order, including network structures with tunable neck length and width, hexagonal-shaped, and rectangular-shaped arrays as well as size tunable nanohole arrays, were fabricated by this route. Promising potentials of such unique periodic nanostructures in various fields, such as photonic crystals, catalysts, templates for deposition, and masks for etching, are naturally expected.

Item Type:Article
Uncontrolled Keywords:Nanosphere lithography - Nanopatterns - Reactive ion etching - Preheating - Nonspherical - Nonclose-packed
Subjects:Material Science > Functional and hybrid materials
Material Science > Nanofabrication processes and tools
Technology > Manufacturing processes for nanotechnology
Engineering > Nanotechnology applications in ICT
Physical Science > Photonics
ID Code:7935
Deposited By:IoN
Deposited On:12 Jan 2010 11:25
Last Modified:12 Jan 2010 11:25

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