Nano Archive

Optical properties of nanostructured a-C:H:Si films

Frolov, V. and Gerasimenko, V. and Kononenko, V. and Pimenov, S. and Khomich, A. and Kovalev, V. and Kirpilenko, G. and Shelukhin, E. (2009) Optical properties of nanostructured a-C:H:Si films. Nanotechnologies in Russia, 4 . pp. 366-372.

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Official URL: http://dx.doi.org/10.1134/S1995078009050152

Abstract

Scanning probe microscopy, spectroscopic ellipsometry, local reflection spectroscopy, and Raman spectrometry were used to determine the correlation between the optical and structural properties of amorphous carbon-silicon a-C:H:Si films and to study the role of the atomic structure during the formation of conical nanoobjects under an electric field in a scanning probe microscope (SPM) lithograph. Based on an analysis of the experimental data, it was shown that films in the initial state are distinguished by a high disorder of the cluster structure. The film material is restructured during the SPM exposure, which is accompanied by the formation of the sp 3 -bound atomic structure and nanostructuring of the sp2-bound carbon; in this case, the refractive index decreases by a factor of ?0.6. The latter is explained by the presence of voids in the modified material.

Item Type:Article
Additional Information:10.1134/S1995078009050152
ID Code:7657
Deposited By:Prof. Alexey Ivanov
Deposited On:11 Nov 2009 07:54
Last Modified:11 Nov 2009 08:00

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