Nano Archive

Nanolithography with atom optics

Balykin, V. and Melentiev, P. (2009) Nanolithography with atom optics. Nanotechnologies in Russia, 4 . pp. 425-447.

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Official URL: http://dx.doi.org/10.1134/S1995078009070040

Abstract

We review the main results obtained in fast-growing new type of particle optics-atom optics and one of its practical applications-atom nanolithography. Basic methods for creating elements of atom optics are considered. Main achievements of atom nanolithography are presented with discussion for atom nanolithography perspectives.

Item Type:Article
Additional Information:10.1134/S1995078009070040
ID Code:7642
Deposited By:Prof. Alexey Ivanov
Deposited On:11 Nov 2009 07:54
Last Modified:11 Nov 2009 08:00

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