Nano Archive

A Monte Carlo simulation of the processes of nanostructure growth: The time-scale event-scheduling algorithm

Zverev, A. and Zinchenko, K. and Shwartz, N. and Yanovitskaya, Z. (2009) A Monte Carlo simulation of the processes of nanostructure growth: The time-scale event-scheduling algorithm. Nanotechnologies in Russia, 4 . pp. 215-224.

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Official URL: http://dx.doi.org/10.1134/S1995078009030094

Abstract

The SilSim3D program package is developed to conduct Monte Carlo simulations of the kinetics of growth, evaporation, and annealing of thin layers on solid substrates on the basis of an original algorithm of scheduling events on a real time scale. The model allows the simulation of various nanoelectronic technological processes in multicomponent physical and chemical systems of more than 107 particles in time intervals comparable with the actual experimental times. The initial stages of atomic layer deposition and the growth of silicon nanowhiskers are simulated as an example.

Item Type:Article
Additional Information:10.1134/S1995078009030094
ID Code:7570
Deposited By:Prof. Alexey Ivanov
Deposited On:11 Nov 2009 07:53
Last Modified:11 Nov 2009 08:00

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