Nano Archive

Computer Simulation of Microsystems Elements

O.M., Ogorodnikova and O.А., Panin (2009) Computer Simulation of Microsystems Elements. Journal of NANO and MICROSYSTEM TECHNIQUE (5).

Full text is not hosted in this archive but may be available via the Official URL, or by requesting a copy from the corresponding author.

Official URL: http:// www.microsystems.ru

Abstract

The thermoelectric microdrive setting the mirror in micro-opto-electromechanical system (MOEMS) is simulated with aid of ANSYS multiphysics tool. The calculations of rotation angle for mirror depending on voltage difference across the pads of thermal actuators are verified. The difference of calculated results and experimental data does not exceed 10 %.

Item Type:Article
ID Code:7546
Deposited By:Prof. Alexey Ivanov
Deposited On:11 Nov 2009 07:52
Last Modified:11 Nov 2009 08:00

Repository Staff Only: item control page