O.M., Ogorodnikova and O.А., Panin (2009) Computer Simulation of Microsystems Elements. Journal of NANO and MICROSYSTEM TECHNIQUE (5).
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The thermoelectric microdrive setting the mirror in micro-opto-electromechanical system (MOEMS) is simulated with aid of ANSYS multiphysics tool. The calculations of rotation angle for mirror depending on voltage difference across the pads of thermal actuators are verified. The difference of calculated results and experimental data does not exceed 10 %.
|Deposited By:||Prof. Alexey Ivanov|
|Deposited On:||11 Nov 2009 07:52|
|Last Modified:||11 Nov 2009 08:00|
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