N.A., Djuzhev and A.F., Popkov and A.N., Popravkin and I.G., Shkuropat and A.N., Shokin (2009) Universal Thermosensitive Element for Gas Plow Sensor. Journal of NANO and MICROSYSTEM TECHNIQUE (2).
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Article is devoted to methods of creation, development and practical application of resistive type thermosensitive elements based on silicon technology with reference to area of measurement of speed of a stream and the charge of gases.
|Deposited By:||Prof. Alexey Ivanov|
|Deposited On:||11 Nov 2009 07:52|
|Last Modified:||11 Nov 2009 08:00|
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