Nano Archive

Universal Thermosensitive Element for Gas Plow Sensor

N.A., Djuzhev and A.F., Popkov and A.N., Popravkin and I.G., Shkuropat and A.N., Shokin (2009) Universal Thermosensitive Element for Gas Plow Sensor. Journal of NANO and MICROSYSTEM TECHNIQUE (2).

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Official URL: http:// www.microsystems.ru

Abstract

Article is devoted to methods of creation, development and practical application of resistive type thermosensitive elements based on silicon technology with reference to area of measurement of speed of a stream and the charge of gases.

Item Type:Article
ID Code:7526
Deposited By:Prof. Alexey Ivanov
Deposited On:11 Nov 2009 07:52
Last Modified:11 Nov 2009 08:00

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