Nano Archive

Thin-Film MEMS and Sensors Based on Such Technology

E.M., Belozubov and N.E., Belozubova and V.А., Vasiliev (2009) Thin-Film MEMS and Sensors Based on Such Technology. Journal of NANO and MICROSYSTEM TECHNIQUE (2).

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Thin-film tensoresistance and capacitive microelectromechanical systems (MEMS) are considered and classified. The generalized system models of the thin-film capacitive pressure sensors are presented used as the sensing elements of relevant MEMS.

Item Type:Article
ID Code:7525
Deposited By:Prof. Alexey Ivanov
Deposited On:11 Nov 2009 07:52
Last Modified:11 Nov 2009 08:00

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