I.I., Bobrinetskii and D.A., Dan'kin and К.V., Gorshkov and V.К., Nevolin (2009) The Carbon Nanotube Based Integrated Structure Formation with Making Use of Dielectrophoresis. Journal of NANO and MICROSYSTEM TECHNIQUE (2).
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We have developed dielectrophoresis methods of controllably and synchronous deposition of different types of carbon nanotubes at the wafer with connecting electrodes matrix. We have suggested electrode geometry modifications for structures manufacturing based on single nanotubes or its network. This work demonstrated the opportunity of dielectrophoresis methods application for carbon nanotubes integration in the conventional microelectronics processes.
|Deposited By:||Prof. Alexey Ivanov|
|Deposited On:||11 Nov 2009 07:52|
|Last Modified:||11 Nov 2009 08:00|
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