Nano Archive

Study of Elastic and Friction Properties of Submicron Layers of Silicon on Sapphire

E.V., Korotkov and N.O., Krivulin and D.A., Pavlov and Р.А., Shilyaev and M.V., Treushnikov (2009) Study of Elastic and Friction Properties of Submicron Layers of Silicon on Sapphire. Journal of NANO and MICROSYSTEM TECHNIQUE (1).

Full text is not hosted in this archive but may be available via the Official URL, or by requesting a copy from the corresponding author.

Official URL: http:// www.microsystems.ru

Abstract

Molecular-beam epitaxy (MBE) layers of silicon with 30— 1000 nm thickness on sapphire were investigated by means of Lateral Force Microscopy (LFM) and Z-modulation mode of Atomic Force Microscopy (AFM). It was shown, that lateral force contrast between silicon and sapphire exists independently of deposited layer thickness, while the difference of elastic properties of silicon and sappliire appears only on thick films (more than 100 nm).

Item Type:Article
ID Code:7514
Deposited By:Prof. Alexey Ivanov
Deposited On:11 Nov 2009 07:51
Last Modified:11 Nov 2009 08:00

Repository Staff Only: item control page