E.V., Korotkov and N.O., Krivulin and D.A., Pavlov and Р.А., Shilyaev and M.V., Treushnikov (2009) Study of Elastic and Friction Properties of Submicron Layers of Silicon on Sapphire. Journal of NANO and MICROSYSTEM TECHNIQUE (1).
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Molecular-beam epitaxy (MBE) layers of silicon with 30— 1000 nm thickness on sapphire were investigated by means of Lateral Force Microscopy (LFM) and Z-modulation mode of Atomic Force Microscopy (AFM). It was shown, that lateral force contrast between silicon and sapphire exists independently of deposited layer thickness, while the difference of elastic properties of silicon and sappliire appears only on thick films (more than 100 nm).
|Deposited By:||Prof. Alexey Ivanov|
|Deposited On:||11 Nov 2009 07:51|
|Last Modified:||11 Nov 2009 08:00|
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