Nano Archive

Both-end opened nanostructure holes by embedded carbon nanotubes realized on thinned membranes on (100) silicon substrates

Abdia, Y. and Mohajerzadeh, S. and Darbaria, S. and Arzi, E. (2007) Both-end opened nanostructure holes by embedded carbon nanotubes realized on thinned membranes on (100) silicon substrates. Physica E: Low-dimensional Systems and Nanostructures, 37 (1-2). pp. 226-230. ISSN 1386-9477

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Official URL: http://www.sciencedirect.com/science?_ob=ArticleUR...

Abstract

Vertically aligned carbon nanotubes (CNT) have been grown in a DC-PECVD apparatus on quartz membranes. [1 0 0]-oriented Si wafer has been anisotropically etched in a KOH solution. A mixture of acetylene and hydrogen gases is used to grow CNT while Ni acts as the catalyst layer. As-grown structures have been coated by titanium dioxide using chemical vapor deposition at atmospheric pressure. By means of a polishing,and ashing process steps followed by total removing of the quartz membrane both ends of CNTs are opened and nano holes are obtained. SEM analysis is used to study the evolution of such nanostructures. (C) 2006 Elsevier B.V. All rights reserved.

Item Type:Article
Subjects:Physical Science > Nanophysics
Physical Science > Nano objects
Material Science > Nanochemistry
Material Science > Nanostructured materials
Divisions:Faculty of Engineering, Science and Mathematics > School of Physics
Faculty of Engineering, Science and Mathematics > School of Chemistry
ID Code:7293
Deposited By:JNCASR
Deposited On:28 Oct 2009 09:41
Last Modified:28 Oct 2009 09:41

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