Abdia, Y. and Mohajerzadeh, S. and Darbaria, S. and Arzi, E. (2007) Both-end opened nanostructure holes by embedded carbon nanotubes realized on thinned membranes on (100) silicon substrates. Physica E: Low-dimensional Systems and Nanostructures, 37 (1-2). pp. 226-230. ISSN 1386-9477
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Abstract
Vertically aligned carbon nanotubes (CNT) have been grown in a DC-PECVD apparatus on quartz membranes. [1 0 0]-oriented Si wafer has been anisotropically etched in a KOH solution. A mixture of acetylene and hydrogen gases is used to grow CNT while Ni acts as the catalyst layer. As-grown structures have been coated by titanium dioxide using chemical vapor deposition at atmospheric pressure. By means of a polishing,and ashing process steps followed by total removing of the quartz membrane both ends of CNTs are opened and nano holes are obtained. SEM analysis is used to study the evolution of such nanostructures. (C) 2006 Elsevier B.V. All rights reserved.
| Item Type: | Article |
|---|---|
| Subjects: | Physical Science > Nanophysics Physical Science > Nano objects Material Science > Nanochemistry Material Science > Nanostructured materials |
| Divisions: | Faculty of Engineering, Science and Mathematics > School of Physics Faculty of Engineering, Science and Mathematics > School of Chemistry |
| ID Code: | 7293 |
| Deposited By: | JNCASR |
| Deposited On: | 28 Oct 2009 09:41 |
| Last Modified: | 28 Oct 2009 09:41 |
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