Debnath , S. K and Kothiyal , M. P and Schmit , J. (2006) Spectrally resolved white-light phase-shifting interference microscopy for thickness-profile measurements of transparent thin film layers on patterned substrates. OPTICS EXPRESS, 14 (11). pp. 4662-4667. ISSN 1094-4087
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Abstract
We describe how spectrally-resolved white-light phase-shifting interference microscopy with a windowed 8-step algorithm can be used for rapid and accurate measurements of the thickness profile of transparent thin film layers with a wide range of thicknesses deposited upon patterned structures exhibiting steps and discontinuities. An advantage of this technique is that it can be implemented with readily available hardware. (c) 2006 Optical Society of America.
| Item Type: | Article |
|---|---|
| Subjects: | Physical Science > Nanophysics Physical Science > Nano objects Material Science > Nanochemistry Material Science > Nanostructured materials |
| Divisions: | Faculty of Engineering, Science and Mathematics > School of Physics Faculty of Engineering, Science and Mathematics > School of Chemistry |
| ID Code: | 6901 |
| Deposited By: | JNCASR |
| Deposited On: | 13 Aug 2009 07:58 |
| Last Modified: | 13 Aug 2009 07:58 |
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