Nano Archive

Spectrally resolved white-light phase-shifting interference microscopy for thickness-profile measurements of transparent thin film layers on patterned substrates

Debnath , S. K and Kothiyal , M. P and Schmit , J. (2006) Spectrally resolved white-light phase-shifting interference microscopy for thickness-profile measurements of transparent thin film layers on patterned substrates. OPTICS EXPRESS, 14 (11). pp. 4662-4667. ISSN 1094-4087

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Official URL: http://www.opticsinfobase.org/oe/abstract.cfm?uri=...

Abstract

We describe how spectrally-resolved white-light phase-shifting interference microscopy with a windowed 8-step algorithm can be used for rapid and accurate measurements of the thickness profile of transparent thin film layers with a wide range of thicknesses deposited upon patterned structures exhibiting steps and discontinuities. An advantage of this technique is that it can be implemented with readily available hardware. (c) 2006 Optical Society of America.

Item Type:Article
Subjects:Physical Science > Nanophysics
Physical Science > Nano objects
Material Science > Nanochemistry
Material Science > Nanostructured materials
Divisions:Faculty of Engineering, Science and Mathematics > School of Physics
Faculty of Engineering, Science and Mathematics > School of Chemistry
ID Code:6901
Deposited By:JNCASR
Deposited On:13 Aug 2009 07:58
Last Modified:13 Aug 2009 07:58

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