Wu, Qi-Hui and Song, Jie and Kang, Junyong and Dong, Quan-Feng and Wu, Sun-Tao and Sun, Shi-Gang (2007) Nano-particle thin films of tin oxides. Materials Letters, 61 (17). 3679 - 3684.
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Official URL: http://www.sciencedirect.com/science/article/B6TX9...
Nano-particle thin films of tin oxides were deposited on SiO2 substrates by using radio frequency (RF) magnetron sputtering with various substrate temperatures, sputtering powers and oxygen partial pressures. The tin oxides thin films were then investigated by X-ray photoelectron spectroscopy (XPS) and scanning electron microscopy (SEM). XPS data suggested that the deposited tin oxides thin films are almost made up of half of SnO2 and half of SnO. The oxygen partial pressure nearly does not affect the chemical stoichiometry of the thin films in our deposition conditions. SEM results showed that the tin oxides thin films were formed by nano-particles with size of about 60 nm. Sputtering power has a strong influence on the particle size of the thin films. Increase of sputtering power will enlarge the size of the particles.
|Uncontrolled Keywords:||Tin oxides; Thin film; Nano-particle|
|Subjects:||Material Science > Nanostructured materials|
|Deposited On:||09 Feb 2010 12:38|
|Last Modified:||09 Feb 2010 12:38|
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