Nano Archive

Deposition of ZnO thin film on polytetrafluoroethylene substrate by the magnetron sputtering method

Liu, Yun-yan and Yuan, Yu-zhen and Gao, Xu-tuan and Yan, Shi-shen and Cao, Xin-zhong and Wei, Gong-xiang (2007) Deposition of ZnO thin film on polytetrafluoroethylene substrate by the magnetron sputtering method. Materials Letters, 61 (23-24). 4463 - 4465.

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Official URL: http://www.sciencedirect.com/science/article/B6TX9...

Abstract

Due to the excellent optical and electrical properties, ZnO thin films deposited on flexible substrates can be used as technologically promising electron devices. Polytetrafluoroethylene (Teflon) had many advanced properties, such as high dielectric strength over various frequencies, low dissipation factor, and high surface electrical resistivity, which had made Teflon a competitive polymer choice in a variety of microelectronic applications. In our work, ZnO film was firstly deposited on Teflon substrate by the magnetron sputtering method. X-ray diffraction data revealed that the ZnO grains were highly c-axis-oriented and nanostructured with the size of 10–30 nm, which was in accordance with the experimental result of Scanning Electron Microscopy.

Item Type:Article
Uncontrolled Keywords:Nano-crystal ZnO; Polytetrafluoroethylene (Teflon); Magnetron sputtering; Electronic materials; Thin films
Subjects:Material Science > Nanofabrication processes and tools
Material Science > Nanostructured materials
ID Code:6698
Deposited By:SPI
Deposited On:09 Feb 2010 15:41
Last Modified:09 Feb 2010 15:41

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