Giuly, Richard and Corno, James A. and Gole, James L. (2008) A simple method for generating nano-pillars and uniformly separated nano-needle arrays on silicon. Materials Letters, 62 (17-18). 2704 - 2706.
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Official URL: http://www.sciencedirect.com/science/article/B6TX9...
A simple method is presented to generate pillared and uniformly spaced nano-needle arrays formed by electrochemical modification of nano-walled, densely packed, pore structures with pore diameters that have minimum variation. Needle structures generated in a single etch procedure are between three and four micrometers tall and taper to points 10 nm or less in diameter. The tip-to-tip spacing is found to be the same as the precursor pore diameter and is nearly uniform at 1 μm. These structures may be useful for intracellular recording. The results obtained appear to be competitive with laser ablation in that a needle array structure of a more uniform height and separation can be formed with a much less complex and expensive procedure.
|Uncontrolled Keywords:||Nano-pillars; Nano-needle arrays; Microstructure; Nano-materials; Semiconductors;|
|Subjects:||Material Science > Nanofabrication processes and tools|
Material Science > Nanostructured materials
|Deposited On:||10 Feb 2010 12:28|
|Last Modified:||10 Feb 2010 12:28|
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