Nano Archive

Local hardness and density variation in glass substrates machined with Spark Assisted Chemical Engraving (SACE)

Didar, Tohid Fatanat and Dolatabadi, Ali and Wüthrich, Rolf (2009) Local hardness and density variation in glass substrates machined with Spark Assisted Chemical Engraving (SACE). Materials Letters, 63 (1). 51 - 53.

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Official URL: http://www.sciencedirect.com/science/article/B6TX9...

Abstract

Spark Assisted Chemical Engraving (SACE) is an unconventional technique for surface micro-machining of non-conductive materials specially glass. SACE offers many advantages for fabrication of microfluidic and Lab on Chip devices. However the exact mechanism of material removal in this technique is not fully understood. Besides, the changes in the properties of the machined sample have not been studied so far. In this letter, the material removed from glass surface is evaluated and the results of nano-indentation test for measurement of the hardness of machined micro-channels surface is reported. Based on the amount of removed mass during machining and results of nano-indentation test on machined samples it is concluded that hardness and density of the machined zones decrease during the process.

Item Type:Article
Uncontrolled Keywords:Mechanical properties; Spark Assisted Chemical Engraving (SACE); Glass 2D-micro-machining; Nano-indentation; Hardness
Subjects:Material Science > Nanostructured materials
ID Code:6613
Deposited By:SPI
Deposited On:10 Feb 2010 15:06
Last Modified:10 Feb 2010 15:06

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