Park, Jae Young and Song, Dong Eon and Kim, Sang Sub (2008) An approach to fabricating chemical sensors based on ZnO nanorod arrays. NANOTECHNOLOGY, 19 (10).
Full text is not hosted in this archive but may be available via the Official URL, or by requesting a copy from the corresponding author.
Official URL: http://www.iop.org/EJ/abstract/-search=66119370.1/...
Vertically and laterally aligned ZnO nanorod arrays were synthesized on Pt-coated Si substrates by catalyst-free metal organic chemical vapor deposition. An approach to fabricating chemical sensors based on the nanorod arrays using a coating-and-etching process with a photo-resist is reported. Tests of the devices as oxygen gas sensors have been performed. Our results demonstrate that the approach holds promise for the realization of sensitive and reliable nanorod array chemical sensors.
|Uncontrolled Keywords:||VAPOR-DEPOSITION; GROWTH|
|Subjects:||Material Science > Nanofabrication processes and tools|
Analytical Science > Nanotechnology for sensing and actuating
|Deposited On:||25 Sep 2009 11:25|
|Last Modified:||25 Sep 2009 11:25|
Repository Staff Only: item control page