Nano Archive

Strong white and blue photoluminescence from silicon nanocrystals in SiNx grown by remote PECVD using SiCl4/NH3

Benami, A. and Santana, G. and Ortiz, A. and Ponce, A. and Romeu, D. and Aguilar-Hernandez, J. and Contreras-Puente, G. and Alonso, J. C. (2007) Strong white and blue photoluminescence from silicon nanocrystals in SiNx grown by remote PECVD using SiCl4/NH3. NANOTECHNOLOGY, 18 (15).

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Official URL: http://www.iop.org/EJ/abstract/0957-4484/18/15/155...

Abstract

Strong white and blue photoluminescence (PL) from as-grown silicon nanocrystals (nc-Si) in SiNx films prepared by remote plasma enhanced chemical vapour deposition using SiCl4/NH3 mixtures is reported. The colour and intensity of the PL could be controlled by adjusting the NH3 flow rate. Samples with white emission were annealed at 1000 degrees C, obtaining a strong improvement of the PL intensity with a blue colour. The PL can be attributed to quantum confinement effect in nc-Si embedded in SiNx matrix, which is improved when a better passivation of nc-Si surface with chlorine and nitrogen atoms is obtained. The size, density and structure of the nc-Si in the as-grown and annealed films were confirmed and measured by high-resolution transmission electron microscopy.

Item Type:Article
Uncontrolled Keywords:CHEMICAL-VAPOR-DEPOSITION; VISIBLE PHOTOLUMINESCENCE; QUANTUM CONFINEMENT; THIN-FILMS; MULTILAYER STRUCTURES; LOW-TEMPERATURE; NITRIDE FILMS; OPTICAL GAIN; SIOX FILMS; HYDROGEN
Subjects:Material Science > Nanofabrication processes and tools
Physical Science > Quantum phenomena
Physical Science > Photonics
ID Code:6379
Deposited By:IoN
Deposited On:28 Sep 2009 10:07
Last Modified:28 Sep 2009 10:07

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