Nano Archive

Formation mechanism of nanocrystalline high-pressure phases in silicon during nanogrinding

Wang, Y. and Zou, J. and Huang, H. and Zhou, L. and Wang, B. L. and Wu, Y. Q. (2007) Formation mechanism of nanocrystalline high-pressure phases in silicon during nanogrinding. NANOTECHNOLOGY, 18 (46).

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Official URL: http://www.iop.org/EJ/abstract/-search=66204934.1/...

Abstract

The phase transformations of Si under nanogrinding have been studied by transmission electron microscopy and Raman spectroscopy. Nanocrystalline high-pressure phases (Si-III/Si-XII) were found in the amorphous layer of the subsurface of heavily ground Si. The sequence of the phase transformation in nanogrinding has been found to be different to that in nanoindentation. The formation mechanism of the nanocrystalline high-pressure phases in nanogrinding is proposed based on experimental results.

Item Type:Article
Uncontrolled Keywords:SINGLE-CRYSTAL SILICON; MONOCRYSTALLINE SILICON; MICRO-INDENTATION; TRANSFORMATIONS; NANOINDENTATION; DEFORMATION; SIMULATION; INDENTER; WAFERS; SHAPE
Subjects:Analytical Science > Microscopy and probe methods
Material Science > Nanofabrication processes and tools
Material Science > Nanostructured materials
ID Code:6334
Deposited By:IoN
Deposited On:29 Sep 2009 10:57
Last Modified:29 Sep 2009 10:57

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