Nano Archive

Single sub-20 nm wide, centimeter-long nanofluidic channel fabricated by novel nanoimprint Mold fabrication and direct imprinting

Liang, Xiaogan and Morton, Keith J. and Austin, Robert H. and Chou, Stephen Y. (2007) Single sub-20 nm wide, centimeter-long nanofluidic channel fabricated by novel nanoimprint Mold fabrication and direct imprinting. NANO LETTERS, 7 (12). pp. 3774-3780.

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Official URL: http://pubs.acs.org/doi/abs/10.1021/nl072253x

Abstract

We report and demonstrate a new method to fabricate single fluidic-channels of uniform channel width (11−50 nm) and over 1.5 cm in length, which are essential to developing innovative bio/chemical sensors but have not been fabricated previously. The method uses unconventional nanofabrication (a combination of crystallographic anisotropic etching, conformal coating, and edge patterning, etc.) to create an imprint mold of a channel pattern and nanoimprint to duplicate such channel. The centimeter-long channel continuity is verified by flowing fluorescent dye-stained water and stretching and transporting DNAs. The 18 by 20 nm channel cross-section was confirmed by measuring the liquid conductance in the channel.

Item Type:Article
Subjects:Material Science > Nanofabrication processes and tools
Analytical Science > Nanotechnology for sensing and actuating
ID Code:6237
Deposited By:IoN
Deposited On:13 Aug 2009 14:18
Last Modified:13 Aug 2009 14:18

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