Nano Archive

Characteristics of solid-state nanometre pores fabricated using a transmission electron microscope

Kim, Min Jun and McNally, Ben and Murata, Kazuyoshi and Meller, Amit (2007) Characteristics of solid-state nanometre pores fabricated using a transmission electron microscope. NANOTECHNOLOGY, 18 (20). (In Press)

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Official URL: http://www.iop.org/EJ/abstract/0957-4484/18/20/205...

Abstract

Solid-state nanopores can be used to detect nucleic acid structures at the single molecule level. An e-beam has been used to fabricate nanopores in silicon nitride and silicon dioxide membranes, but the pore formation kinetics, and hence its final structure, remain poorly understood. With the aid of high-resolution TEM imaging as well as TEM tomography we examine the effect of Si3N4 material properties on the nanopore structure. In particular, we study the dependence of membrane thickness on the nanopore contraction rate for different initial pore sizes. We explain nanopore formation kinetics as a balance of two opposite processes: (a) material sputtering and (b) surface-tension-induced shrinking.

Item Type:Article
Subjects:Material Science > Nanofabrication processes and tools
ID Code:6228
Deposited By:IoN
Deposited On:10 Sep 2009 16:20
Last Modified:10 Sep 2009 16:20

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