Sharma, Parmanand and Kaushik, Neelam and Kimura, Hisamichi and Saotome, Yasunori and Inoue, Akihisa (2007) Nano-fabrication with metallic glass - an exotic material for nano-electromechanical systems. NANOTECHNOLOGY, 18 (3).
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Official URL: http://www.iop.org/EJ/abstract/0957-4484/18/3/0353...
Abstract
Completely glassy thin films of Zr–Al–Cu–Ni exhibiting a large supercooled liquid region (ΔTx = 95 K), very smooth surface (Ra = 0.2 nm) and high value of Vickers hardness (Hv = 940) were deposited by sputtering. The micro/nano-patterning ability of these films is demonstrated by focused ion beam etching (smallest pattern ~12 nm), as well as by the imprint lithography technique (smallest feature ~34 nm). These glassy films having very good mechanical and chemical properties, combined with superb nano-patterning ability, integrateable with silicon integrated circuit technology, are promising for fabrication of a wide range of two- or three-dimensional components for future nano-electromechanical systems.
| Item Type: | Article |
|---|---|
| Subjects: | Material Science > Nanofabrication processes and tools |
| ID Code: | 6219 |
| Deposited By: | IoN |
| Deposited On: | 10 Sep 2009 15:57 |
| Last Modified: | 10 Sep 2009 15:57 |
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