Shen, Jing-Chung and Jywe, Wen-Yuh and Chiang, Huan-Keng and Shu, Yu-Ling (2008) Precision tracking control of a piezoelectric-actuated system. PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 32 (2). pp. 71-78.
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Abstract
In this paper, precision tracking control of piezoelectric-actuated systems is discussed. In order to obtain precision tracking control, a modified Prandtl-Ishlinskii (MPI) model is used to model the hysteresis nonlinearity. Then, the inverse MPI model is used to reduce the hysteresis nonlinearity, and a sliding-mode controller is used to compensate for the remaining nonlinear uncertainty and disturbances. In general, the piezoelectric-actuated system can be modeled as a linear model coupled with a hysteresis. When the linear model is identified, it is used to design the sliding-mode controller. Finally, this design method is applied to the motion control of a nano-stage, and experimental results are presented to verify the usefulness of this method. (C) 2007 Elsevier Inc. All rights reserved.
| Item Type: | Article |
|---|---|
| Uncontrolled Keywords: | piezoelectric actuator; nano-positioning; sliding-mode control; tracking control |
| Subjects: | Physical Science > Nanophysics Material Science > Nanofabrication processes and tools Engineering > Nanotechnology applications in mechanical engineering Physical Science > Nano objects |
| ID Code: | 6085 |
| Deposited By: | IoN |
| Deposited On: | 13 Apr 2010 08:33 |
| Last Modified: | 13 Apr 2010 08:33 |
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