Nano Archive

Precision tracking control of a piezoelectric-actuated system

Shen, Jing-Chung and Jywe, Wen-Yuh and Chiang, Huan-Keng and Shu, Yu-Ling (2008) Precision tracking control of a piezoelectric-actuated system. PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 32 (2). pp. 71-78.

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In this paper, precision tracking control of piezoelectric-actuated systems is discussed. In order to obtain precision tracking control, a modified Prandtl-Ishlinskii (MPI) model is used to model the hysteresis nonlinearity. Then, the inverse MPI model is used to reduce the hysteresis nonlinearity, and a sliding-mode controller is used to compensate for the remaining nonlinear uncertainty and disturbances. In general, the piezoelectric-actuated system can be modeled as a linear model coupled with a hysteresis. When the linear model is identified, it is used to design the sliding-mode controller. Finally, this design method is applied to the motion control of a nano-stage, and experimental results are presented to verify the usefulness of this method. (C) 2007 Elsevier Inc. All rights reserved.

Item Type:Article
Uncontrolled Keywords:piezoelectric actuator; nano-positioning; sliding-mode control; tracking control
Subjects:Physical Science > Nanophysics
Material Science > Nanofabrication processes and tools
Engineering > Nanotechnology applications in mechanical engineering
Physical Science > Nano objects
ID Code:6085
Deposited By:IoN
Deposited On:13 Apr 2010 08:33
Last Modified:13 Apr 2010 08:33

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