Rastelli, Armando and Stoffel, Mathieu and Malachias, Angelo and Merdzhanova, Tsvetelina and Katsaros, Georgios and Kern, Klaus and Metzger, Till H. and Schmidt, Oliver G. (2008) Three-dimensional composition profiles of single quantum dots determined by scanning-probe-microscopy-based nanotomography. NANO LETTERS, 8 (5). pp. 1404-1409. (Submitted)
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Official URL: http://pubs.acs.org/doi/full/10.1021/nl080290y
Abstract
Scanning probe microscopy combined with selective wet chemical etching is employed to quantitatively determine the full three-dimensional (3D) composition profiles of single strained SiGe/Si(001) islands. The technique allows us to simultaneously obtain 3D profiles for both coherent and dislocated islands and to collect data with large statistics. Lateral and vertical composition gradients are observed, and their origin is discussed. X-ray scattering measurements performed on a large sample area are used to validate the results.
| Item Type: | Article |
|---|---|
| Uncontrolled Keywords: | ISLAND FORMATION; GE ISLANDS; SI(001) |
| Subjects: | Analytical Science > Microscopy and probe methods Material Science > Functional and hybrid materials |
| ID Code: | 6068 |
| Deposited By: | IoN |
| Deposited On: | 15 Sep 2009 10:00 |
| Last Modified: | 15 Sep 2009 10:00 |
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