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The future of lithography: SEMATECH Litho Forum 2008

Willson, C. Grant and Roman, Bernard J. (2008) The future of lithography: SEMATECH Litho Forum 2008. ACS NANO, 2 (7). pp. 1323-1328.

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The biannual SEMATECH Litho Forum was held May 12−14, 2008 in Bolton Landing, NY, not far from SEMATECH’s facility at Albany Nanotech. This biannual meeting is designed to assess the progress in advanced patterning technology and to produce consensus about the processes that will be used to manufacture the next generations of devices. A summary of the key ideas presented at the meeting is given in this paper, along with the future challenges and opportunities in emerging lithographic technologies.

Item Type:Article
Subjects:Material Science > Nanofabrication processes and tools
Material Science > Nanostructured materials
ID Code:6030
Deposited By:IoN
Deposited On:28 Jul 2009 16:34
Last Modified:28 Jul 2009 16:34

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