Zoriy, Myroslav V. and Mayer, Dirk and Becker, J. Sabine (2009) Metal Imaging on Surface of Micro- and Nanoelectronic Devices by Laser Ablation Inductively Coupled Plasma Mass Spectrometry and Possibility to Measure at Nanometer Range. Journal of the American Society for Mass Spectrometry, 20 (5). 883 - 890.
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Official URL: http://www.sciencedirect.com/science/article/B6TH2...
An analytical mass spectrometric method for the elemental analysis of nano-bioelectronic devices involved in bioengineering research was developed and applied for measurements of selected metals (Au, Ti, Pt, Cr, etc.) on interdigitated electrode array chips (IDA-chip). An imaging laser ablation inductively coupled plasma mass spectrometric (LA-ICP-MS) procedure was used to map the elements of interest on the surface of the analyzed sample. The obtained images of metals were in a good agreement and corresponded to the micro- and nanofabricated metal electrode pattern. For the analysis at nanometer resolution scale a NF-LA-ICP-MS (NF-near-field) procedure was applied, which utilize thin Ag needle to enhance laser beam energy and improve spatial resolution of the method. The results show a 100× enhancement of analyte signal, when the needle was positioned in the “near-field region” to the sample surface and the laser shot was performed. In addition, mass spectrometric studies of reproducibly for five separated NF-LA shots in different places of analyzed sample yielded an RSD of the measurement of 16%.
|Subjects:||Analytical Science > Microscopy and probe methods|
Physical Science > Nanoelectronics
|Deposited On:||03 Aug 2009 09:39|
|Last Modified:||03 Aug 2009 09:39|
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