Nano Archive

Metal Imaging on Surface of Micro- and Nanoelectronic Devices by Laser Ablation Inductively Coupled Plasma Mass Spectrometry and Possibility to Measure at Nanometer Range

Zoriy, Myroslav V. and Mayer, Dirk and Becker, J. Sabine (2009) Metal Imaging on Surface of Micro- and Nanoelectronic Devices by Laser Ablation Inductively Coupled Plasma Mass Spectrometry and Possibility to Measure at Nanometer Range. Journal of the American Society for Mass Spectrometry, 20 (5). 883 - 890.

Full text is not hosted in this archive but may be available via the Official URL, or by requesting a copy from the corresponding author.

Official URL: http://www.sciencedirect.com/science/article/B6TH2...

Abstract

An analytical mass spectrometric method for the elemental analysis of nano-bioelectronic devices involved in bioengineering research was developed and applied for measurements of selected metals (Au, Ti, Pt, Cr, etc.) on interdigitated electrode array chips (IDA-chip). An imaging laser ablation inductively coupled plasma mass spectrometric (LA-ICP-MS) procedure was used to map the elements of interest on the surface of the analyzed sample. The obtained images of metals were in a good agreement and corresponded to the micro- and nanofabricated metal electrode pattern. For the analysis at nanometer resolution scale a NF-LA-ICP-MS (NF-near-field) procedure was applied, which utilize thin Ag needle to enhance laser beam energy and improve spatial resolution of the method. The results show a 100× enhancement of analyte signal, when the needle was positioned in the “near-field region” to the sample surface and the laser shot was performed. In addition, mass spectrometric studies of reproducibly for five separated NF-LA shots in different places of analyzed sample yielded an RSD of the measurement of 16%.

Item Type:Article
Subjects:Analytical Science > Microscopy and probe methods
Physical Science > Nanoelectronics
ID Code:5678
Deposited By:SPI
Deposited On:03 Aug 2009 09:39
Last Modified:03 Aug 2009 09:39

Repository Staff Only: item control page