Tan, C and Peng, C S and Pakarinen, J and Pessa, M and Petryakov, V N and Verevkin, Yu K and Zhang, J and Wang, Z and Olaizola, S M and Berthou, T and Tisserand, S (2009) Ordered nanostructures written directly by laser interference. Nanotechnology, 20 (12). 125303 (5pp).
Full text is not hosted in this archive but may be available via the Official URL, or by requesting a copy from the corresponding author.
Official URL: http://stacks.iop.org/0957-4484/20/125303
Abstract
We present a simplified method to employ laser interference lithography for the fabrication of ordered nanostructures. Neither resist, nor an elaborate fabrication process was needed. Four-beam interference patterns generated in this work included periodic arrays of holes in GaAs, covered with SiO2 bubbles, and they were directly written into the sample. The diameters of the smallest holes were less than 30 nm. We propose a model to interpret the results.
| Item Type: | Article |
|---|---|
| ID Code: | 5125 |
| Deposited By: | Prof. Alexey Ivanov |
| Deposited On: | 09 May 2009 00:22 |
| Last Modified: | 09 May 2009 00:22 |
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