Ferri, Carlo and Brousseau, Emmanuel (2008) Variability in measurements of micro lengths with a white light interferometer. Quality and Reliability Engineering International, 24 (8). pp. 881-890. ISSN printed: 0748-8017 ; electronic: 1099-1638
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Official URL: http://www3.interscience.wiley.com/journal/1178997...
Abstract
The effect of the discretionary set-up parameters scan length and initial scanner position on the measurements of length performed with a white light interferometer microscope was investigated. In both analyses, two reference materials of nominal lengths 40 and 200 µm were considered. Random effects and mixed effects models were fitted to the data from two separate experiments. Punctual and interval estimates of variance components were provided.
| Item Type: | Article |
|---|---|
| Uncontrolled Keywords: | random effects ANOVA , linear mixed models , white light interferometry , WLI , uncertainty , gauge capability analysis |
| Subjects: | Analytical Science > Microscopy and probe methods Engineering > Nanotechnology applications in mechanical engineering Analytical Science > Metrology and standards in nanotechnology |
| Divisions: | Faculty of Engineering, Science and Mathematics > School of Physics Faculty of Engineering, Science and Mathematics > School of Electronics and Computer Science Faculty of Engineering, Science and Mathematics > School of Engineering Sciences Faculty of Engineering, Science and Mathematics > School of Mathematics |
| ID Code: | 4982 |
| Deposited By: | Carlo Ferri |
| Deposited On: | 09 Apr 2009 19:54 |
| Last Modified: | 09 Apr 2009 19:54 |
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- Variability in measurements of micro lengths with a white light interferometer. (deposited UNSPECIFIED)
- Variability in measurements of micro lengths with a white light interferometer. (deposited 09 Apr 2009 19:54) [Currently Displayed]
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