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Variability in measurements of micro lengths with a white light interferometer

Ferri, Carlo and Brousseau, Emmanuel (2008) Variability in measurements of micro lengths with a white light interferometer. Quality and Reliability Engineering International, 24 (8). pp. 881-890. ISSN printed: 0748-8017 ; electronic: 1099-1638

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Official URL: http://www3.interscience.wiley.com/journal/1178997...

Abstract

The effect of the discretionary set-up parameters scan length and initial scanner position on the measurements of length performed with a white light interferometer microscope was investigated. In both analyses, two reference materials of nominal lengths 40 and 200 µm were considered. Random effects and mixed effects models were fitted to the data from two separate experiments. Punctual and interval estimates of variance components were provided.

Item Type:Article
Uncontrolled Keywords:random effects ANOVA , linear mixed models , white light interferometry , WLI , uncertainty , gauge capability analysis
Subjects:Analytical Science > Microscopy and probe methods
Engineering > Nanotechnology applications in mechanical engineering
Analytical Science > Metrology and standards in nanotechnology
Divisions:Faculty of Engineering, Science and Mathematics > School of Physics
Faculty of Engineering, Science and Mathematics > School of Electronics and Computer Science
Faculty of Engineering, Science and Mathematics > School of Engineering Sciences
Faculty of Engineering, Science and Mathematics > School of Mathematics
ID Code:4982
Deposited By:Carlo Ferri
Deposited On:09 Apr 2009 19:54
Last Modified:09 Apr 2009 19:54

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