Nano Archive

Development of a novel flexure-based microgripper for high precision micro-object manipulation

Zubir, Mohd Nashrul Mohd and Shirinzadeh, Bijan and Tian, Yanling (2009) Development of a novel flexure-based microgripper for high precision micro-object manipulation. Sensors and Actuators A: Physical, 150 (2). 257 - 266.

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Micro-scaled parts with dimension below 1 mm need to be manipulated with high precision and consistency in order to guarantee successful microassembly process. Often these requirements are difficult to be achieved particularly due to the problems associated with the structural integrity of the grasping mechanism which will affect the accuracy of the manipulation. Furthermore, the object's texture and fragility imply that small perturbation by the grasping mechanism can result in substantial damage to the object and leads to the degradation of its geometry, shape, and quality. This paper focuses on the unification of two designing approaches to develop a compliant-based microgripper for performing high precision manipulation of micro-objects. A combination of Pseudo Rigid Body Model (PRBM) and Finite Element Analysis (FEA) technique has proven to improve the design efficiency by providing the essential guideline to expedite the prototyping procedure which effectively reduces the cost and modeling time. An Electro Discharge Machining (EDM) technique was utilized for the fabrication of the device. Series of experimental studies were conducted for performance verification and the results are compared with the computational analysis results. A high displacement amplification and maximum stroke of 100 μm can be achieved.

Item Type:Article
Uncontrolled Keywords:Microgripper; Piezoelectric actuator; Flexure hinges; Bias spring; Micromanipulation
Subjects:Analytical Science > Microscopy and probe methods
Material Science > Nanofabrication processes and tools
Analytical Science > Nanotechnology for sensing and actuating
ID Code:4969
Deposited By:SPI
Deposited On:09 Apr 2009 11:44
Last Modified:09 Apr 2009 11:44

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