Nano Archive

Piezoelectric unimorph valve assembled on an LTCC substrate

Sobocinski, Maciej and Juuti, J and Jantunen, H and Golonka, L (2009) Piezoelectric unimorph valve assembled on an LTCC substrate. Sensors and Actuators A: Physical, 149 (2). 315 - 319.

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In this paper a piezoelectric initially open valve was designed in low temperature co-fired ceramic (LTCC), manufactured using standard processes, and tested with integrated gas channels inside the LTCC module. Actuation of the valve was based on a piezoelectric unimorph with a diameter of 15 mm and thickness of 0.35 mm glued onto the fired LTCC substrate. Subsequently, a series of tests, including flow, displacement and switching time measurements, was carried out. Measurements of the valve revealed a flow of 143 ml/min under 1 bar pressure, leakage levels of 4%, valve displacement of 1.3 μm, and closing times less than 30 ms. Additional miniaturization and integration of an embedded valve in the LTCC will be pursued, enabling improved manufacturing as a batch process and micro- and nano-litre fluid management for various applications.

Item Type:Article
Uncontrolled Keywords:LTCC; Piezoelectric; Microvalve; Microfluidic
Subjects:Technology > Manufacturing processes for nanotechnology
ID Code:4954
Deposited By:SPI
Deposited On:09 Apr 2009 12:24
Last Modified:09 Apr 2009 12:24

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