Piezoelectric unimorph valve assembled on an LTCC substrate

Abstract

In this paper a piezoelectric initially open valve was designed in low temperature co-fired ceramic (LTCC), manufactured using standard processes, and tested with integrated gas channels inside the LTCC module. Actuation of the valve was based on a piezoelectric unimorph with a diameter of 15 mm and thickness of 0.35 mm glued onto the fired LTCC substrate. Subsequently, a series of tests, including flow, displacement and switching time measurements, was carried out. Measurements of the valve revealed a flow of 143 ml/min under 1 bar pressure, leakage levels of 4%, valve displacement of 1.3 μm, and closing times less than 30 ms. Additional miniaturization and integration of an embedded valve in the LTCC will be pursued, enabling improved manufacturing as a batch process and micro- and nano-litre fluid management for various applications.