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A MEMS-based resonant-scanning lamellar grating Fourier transform micro-spectrometer with laser reference system

Lee, Feiwen and Zhou, Guangya and Yu, Hongbin and Chau, Fook Siong (2009) A MEMS-based resonant-scanning lamellar grating Fourier transform micro-spectrometer with laser reference system. Sensors and Actuators A: Physical, 149 (2). 221 - 228.

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Official URL: http://www.sciencedirect.com/science/article/B6THG...

Abstract

A lamellar grating Fourier transform infra-red (FTIR) micro-spectrometer is presented in which the device is electromagnetically actuated in resonant mode so as to achieve larger displacements with a lower driving voltage. By actuating at resonance, we can also have a design with a higher spring stiffness design such that the micro-spectrometer will have little influence from external perturbation. A data acquisition electronic system is designed such that the interferogram of the IR source can still be acquired at a fixed optical path distance (OPD) intervals. This is achieved by using a reference laser source. Working at a resonant frequency of 330 Hz, a 100 μm (bi-directional) displacement is achieved by the device with an input voltage of 2.2 V. A tunable laser source is used to demonstrate the system performance. The peak of the recorded spectra is very close to the actual wavelength of the IR, with a maximum difference of less than 5 nm.

Item Type:Article
Uncontrolled Keywords:MEMS; Lamellar gratings; Spectrometer; Fourier transform; Resonant; Reference sampling
Subjects:Analytical Science > Nanotechnology for sensing and actuating
Engineering > Nanotechnology applications in ICT
ID Code:4948
Deposited By:SPI
Deposited On:09 Apr 2009 12:38
Last Modified:09 Apr 2009 12:38

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