Nano Archive

Design, fabrication and test of integrated micro-scale vibration-based electromagnetic generator

Kulkarni, Santosh and Koukharenko, Elena and Torah, Russell and Tudor, John and Beeby, Steve and O'Donnell, Terence and Roy, Saibal (2008) Design, fabrication and test of integrated micro-scale vibration-based electromagnetic generator. Sensors and Actuators A: Physical, 145-146 . 336 - 342.

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Official URL: http://www.sciencedirect.com/science/article/B6THG...

Abstract

This paper discusses the design, fabrication and testing of electromagnetic microgenerators. Three different designs of power generators are partially micro-fabricated and assembled. Prototype A having a wire-wound copper coil, Prototype B, an electrodeposited copper coil both on a deep reactive ion etched (DRIE) silicon beam and paddle. Prototype C uses moving NdFeB magnets in between two micro-fabricated coils. The integrated coil, paddle and beam were fabricated using standard micro-electro-mechanical systems (MEMS) processing techniques. For Prototype A, the maximum measured power output was 148 nW at 8.08 kHz resonant frequency and 3.9 m/s2 acceleration. For Prototype B, the microgenerator gave a maximum load power of 23 nW for an acceleration of 9.8 m/s2, at a resonant frequency of 9.83 kHz. This is a substantial improvement in power generated over other micro-fabricated silicon-based generators reported in literature. This generator has a volume of 0.1 cm3 which is lowest of all the silicon-based micro-fabricated electromagnetic power generators reported. To verify the potential of integrated coils in electromagnetic generators, Prototype C was assembled. This generated a maximum load power of 586 nW across 110 Ω load at 60 Hz for an acceleration of 8.829 m/s2.

Item Type:Article
Additional Information:Special Issue: Transducers/07 Eurosensors XXI, The 14th International Conference on Solid State Sensors, Actuators and Microsystems and the 21st European Conference on Solid-State Transducers, The 14th International Conference on Solid State Sensors, Actuators and Microsystems and the 21st European Conference on Solid-State Transducers
Uncontrolled Keywords:Energy harvesting from vibrations; Micro-fabricated electromagnetic power generator; MEMS fabrication techniques; Testing of power generator
Subjects:Analytical Science > Nanotechnology for sensing and actuating
Technology > Nanotechnology and energy applications
ID Code:4941
Deposited By:SPI
Deposited On:09 Apr 2009 12:53
Last Modified:09 Apr 2009 12:53

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