Nano Archive

A reusable high aspect ratio parylene-C shadow mask technology for diverse micropatterning applications

Selvarasah, S and Chao, S. H. and Chen, C. -L. and Sridhar, S and Busnaina, A and Khademhosseini, A and Dokmeci, M. R. (2008) A reusable high aspect ratio parylene-C shadow mask technology for diverse micropatterning applications. Sensors and Actuators A: Physical, 145-146 . 306 - 315.

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Official URL: http://www.sciencedirect.com/science/article/B6THG...

Abstract

In this paper, we present a low cost, flexible and reusable parylene-C shadow mask technology for diverse micropatterning applications. The smallest feature size of 4 μm is demonstrated and the technology is scalable up to full wafer scale. With the addition of SU-8 pillars, we also demonstrate multimask processing with an alignment accuracy of about 4–9 μm. To achieve features with fine resolution, a low temperature and high aspect ratio (>8:1) parylene etch process is also developed. Utilizing this shadow mask, we successfully patterned proteins and cells on various surfaces (glass, PDMS, methacrylate). High pattern flexibility (structures with different shapes and dimensions are successfully patterned) and patterning on curved PDMS surfaces are also demonstrated. This technology has potential applications for patterning proteins, cells and organic transistors on conventional and/or unconventional substrates.

Item Type:Article
Additional Information:Special Issue: Transducers/07 Eurosensors XXI, The 14th International Conference on Solid State Sensors, Actuators and Microsystems and the 21st European Conference on Solid-State Transducers, The 14th International Conference on Solid State Sensors, Actuators and Microsystems and the 21st European Conference on Solid-State Transducers
Uncontrolled Keywords:Parylene-C; Flexible shadow masks; High aspect ratio polymer etching
Subjects:Biomedical Science > Nanobiotechnology
Engineering > Nanotechnology applications in ICT
ID Code:4938
Deposited By:SPI
Deposited On:09 Apr 2009 13:01
Last Modified:09 Apr 2009 13:01

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