Nano Archive

In-plane MEMS-based nano-g accelerometer with sub-wavelength optical resonant sensor

Krishnamoorthy, U and Olsson, R. H. and Bogart, Gregory R. and Baker, M. S. and Carr, D. W. and Swiler, T. P. and Clews, P. J. (2008) In-plane MEMS-based nano-g accelerometer with sub-wavelength optical resonant sensor. Sensors and Actuators A: Physical, 145-146 . 283 - 290.

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Official URL: http://www.sciencedirect.com/science/article/B6THG...

Abstract

We have successfully demonstrated a series of results that push the limits of optical sensing, acceleration sensing and lithography. Previously, we built some of the most sensitive displacement sensors with displacement sensitivities as low as at 1 kHz. Using reference detection circuitry in conjunction with correlated double sampling methods, we lowered the 1/f noise floor to 10 mHz, hence improving the detection limit at low frequencies (10 mHz) by 77 dB to . We converted these highly sensitive displacement sensors to highly sensitive acceleration sensors through a direct mass integration processes. Our accelerometers have resonant frequencies as low as 36 Hz and thermal noise floors as low as (where 1 G = 9.8 m/s2). We have pushed the limits of shaker table experiments to independently verify acceleration measurements as low as . Direct measurements with our integrated sub-wavelength optical nano-grating accelerometers have shown device sensitivities of 590 V/G and noise floors corresponding to (at 1 Hz).

Item Type:Article
Additional Information:Special Issue: Transducers/07 Eurosensors XXI, The 14th International Conference on Solid State Sensors, Actuators and Microsystems and the 21st European Conference on Solid-State Transducers, The 14th International Conference on Solid State Sensors, Actuators and Microsystems and the 21st European Conference on Solid-State Transducers
Uncontrolled Keywords:Nano-grating; MEMS optical accelerometer; Optical resonant detection; In-plane accelerometer; Optical sensing; Low-g accelerations
Subjects:Physical Science > Nano objects
Analytical Science > Nanotechnology for sensing and actuating
ID Code:4937
Deposited By:SPI
Deposited On:09 Apr 2009 13:03
Last Modified:08 May 2009 10:01

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