Nano Archive

A passive gap-spacing control scheme for in-plane nano-precision sensing and positioning applications

Ramakrishnan, Narayanan and Chu, Patrick B. and Johns, Earl C. and Zhao, Yongjun and Yan, Xiaoping (2008) A passive gap-spacing control scheme for in-plane nano-precision sensing and positioning applications. Sensors and Actuators A: Physical, 145-146 . 214 - 223.

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Official URL: http://www.sciencedirect.com/science/article/B6THG...

Abstract

Many advanced microsystems rely on nanometer-resolution in-plane motion between two substrates requiring precise control of gap spacing. Accurately maintained gaps may not only provide desired mechanical response but also enable position-sensing and signal transduction between the substrates. A method of passive gap-spacing control using MEMS-fabricated rigid spacers is proposed. A model to design a low-friction and low-wear interface between the sliding substrates is developed. Prototype parts with hard-coated interfaces and with and without lubrication were fabricated and tested. Sliding friction coefficients of less than 0.1 were achieved on prototype parts with boundary lubrication over a million sliding cycles. Wear life of several million sliding cycles is predicted.

Item Type:Article
Additional Information:Special Issue: Transducers/07 Eurosensors XXI, The 14th International Conference on Solid State Sensors, Actuators and Microsystems and the 21st European Conference on Solid-State Transducers, The 14th International Conference on Solid State Sensors, Actuators and Microsystems and the 21st European Conference on Solid-State Transducers
Uncontrolled Keywords:Sliding contact; Gap-spacing control; Passive air-gap control; DLC coating; Boundary lubricated; Capacitive sensors
Subjects:Analytical Science > Nanotechnology for sensing and actuating
ID Code:4933
Deposited By:SPI
Deposited On:09 Apr 2009 13:20
Last Modified:09 Apr 2009 13:20

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