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Polymer microoptoelectromechanical systems: Accelerometers and variable optical attenuators

Cadarso, Victor J. and Llobera, A and Villanueva, G and Seidemann, V and Büttgenbach, S and Plaza, J. A. (2008) Polymer microoptoelectromechanical systems: Accelerometers and variable optical attenuators. Sensors and Actuators A: Physical, 145-146 . 147 - 153.

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Official URL: http://www.sciencedirect.com/science/article/B6THG...

Abstract

This paper presents the design, fabrication and characterization of polymer microoptoelectromechanical systems (MOEMS). An optical accelerometer and a variable optical attenuator (VOA) based on SU-8 are presented. Both devices consist on a quad-beam polymer structure and can be fabricated with a simple technology, requiring only two photolithographic steps. Self-alignment structures for fast and accurate fiber optic positioning have also been implemented in both devices. The accelerometer working principle consists on a misalignment between the three waveguides, which comprise the structure, as acceleration is applied. Experimental optical sensitivities of 13.1 dB/g for negative and 17.5 dB/g for positive accelerations, and a high repeatability in an uncontrolled atmosphere are observed. Using the same devices and taking advantage of the high thermal expansion (CTE) of the SU-8, it is possible to obtain a low-power consumption VOA. Experimental results show an attenuation of 20 dB for a power consumption of 12 mW.

Item Type:Article
Additional Information:Special Issue: Transducers/07 Eurosensors XXI, The 14th International Conference on Solid State Sensors, Actuators and Microsystems and the 21st European Conference on Solid-State Transducers, The 14th International Conference on Solid State Sensors, Actuators and Microsystems and the 21st European Conference on Solid-State Transducers
Uncontrolled Keywords:Microoptomechanical systems (MOEMS); Polymer technology; SU-8; Optical accelerometers; Electrothermal actuators; Variable optical attenuators (VOA)
Subjects:Analytical Science > Nanotechnology for sensing and actuating
ID Code:4930
Deposited By:SPI
Deposited On:09 Apr 2009 13:27
Last Modified:09 Apr 2009 13:27

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