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A low-cost and highly integrated fiber optical pressure sensor system

Ceyssens, F and Driesen, M and Wouters, K and Puers, R and Leuven, K. U. (2008) A low-cost and highly integrated fiber optical pressure sensor system. Sensors and Actuators A: Physical, 145-146 . 81 - 86.

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Official URL: http://www.sciencedirect.com/science/article/B6THG...

Abstract

This paper presents a simple, affordable, fiber-optic based pressure measurement system, in which both sensor and readout parts are constructed using batch micromachining techniques, supplemented with some straightforward assembly steps. Prototypes of relative and absolute pressure sensors parts and a readout part have been realized. Goal of this research is to enable deployment of such harsh-environment sensors in high-volume, low-cost applications.

Item Type:Article
Additional Information:Special Issue: Transducers/07 Eurosensors XXI, The 14th International Conference on Solid State Sensors, Actuators and Microsystems and the 21st European Conference on Solid-State Transducers, The 14th International Conference on Solid State Sensors, Actuators and Microsystems and the 21st European Conference on Solid-State Transducers
Uncontrolled Keywords:Optical sensors; Pressure sensors; Waveguides
Subjects:Analytical Science > Nanotechnology for sensing and actuating
ID Code:4928
Deposited By:SPI
Deposited On:09 Apr 2009 14:08
Last Modified:09 Apr 2009 14:08

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