Nano Archive

Temperature-dependent thermomechanical noise spectra of doped silicon microcantilevers

Lee, Jungchul and Goericke, Fabian and King, William P. (2008) Temperature-dependent thermomechanical noise spectra of doped silicon microcantilevers. Sensors and Actuators A: Physical, 145-146 . 37 - 43.

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Official URL: http://www.sciencedirect.com/science/article/B6THG...

Abstract

This paper reports temperature-dependent thermomechanical noise spectra of boron-doped silicon microcantilevers over the temperature range of 25–175 °C and cantilever power up to 75 mW. Either local heating from integrated solid state resistors or uniform heating on a hotplate were employed. Using a cantilever with oxide residue, the temperature coefficient of the resonance frequency was 1.10 × 10−4 °C−1 for uniform heating and 2.84 × 10−4 °C−1 for local heating. Local heating thus modulated the resonance frequency more dramatically than uniform heating. For the oxide-coated cantilever, the cantilever resonance frequency increased with increasing temperature. However, when the oxide was removed, the resonance frequency decreased with increasing temperature. By employing two cantilever types having different doped resistors, three different thermal loadings characterized by the temperature gradient were investigated. When the highest temperature was at the cantilever base, the cantilever mechanical properties were more highly affected than when the highest temperature was at the cantilever free end.

Item Type:Article
Additional Information:Special Issue: Transducers/07 Eurosensors XXI, The 14th International Conference on Solid State Sensors, Actuators and Microsystems and the 21st European Conference on Solid-State Transducers, The 14th International Conference on Solid State Sensors, Actuators and Microsystems and the 21st European Conference on Solid-State Transducers
Uncontrolled Keywords:Hot spot; Microcantilever; Quality factor; Resonance frequency; Stress; Temperature
Subjects:Analytical Science > Nanotechnology for sensing and actuating
ID Code:4927
Deposited By:SPI
Deposited On:09 Apr 2009 14:10
Last Modified:09 Apr 2009 14:10

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