Nano Archive

Mechanical calibration of MEMS springs with sub-micro-Newton force resolution

Miyamoto, Kenji and Jomori, Tomoya and Sugano, Koji and Tabata, Osamu and Tsuchiya, Toshiyuki (2008) Mechanical calibration of MEMS springs with sub-micro-Newton force resolution. Sensors and Actuators A: Physical, 143 (1). 136 - 142.

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Official URL: http://www.sciencedirect.com/science/article/B6THG...

Abstract

Direct stiffness calibration of microelectromechanical-system (MEMS) springs made of single-crystal silicon was performed using a previously developed mechanical force measurement tool. The spring devices used for calibration were fabricated from silicon-on-insulator wafers and contained one or four folded-beam springs. The spring constants were directly measured using an electromagnetic force-feedback balance with a force resolution of about 0.2 μN. The average measured spring constant of a folded-beam spring with a designed constant of 0.7 N/m was 0.58 N/m. This successful calibration shows that this tool can be used to calibrate various kinds of MEMS flexible structures.

Item Type:Article
Additional Information:Micromechanics Section of Sensors and Actuators (SAMM), based on contributions revised from the Technical Digest of the IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS 2007) - MEMS 2007, IEEE 20th International Conference on Micro Electro Mechanical Systems
Uncontrolled Keywords:Calibration; Spring constant; Folded beam; Single-crystal silicon
Subjects:Engineering > Nanotechnology applications in mechanical engineering
Analytical Science > Nanotechnology for sensing and actuating
Engineering > Nanotechnology applications in ICT
ID Code:4923
Deposited By:SPI
Deposited On:09 Apr 2009 14:19
Last Modified:09 Apr 2009 14:19

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