Nano Archive

Pneumatic gas regulator with cascaded PDMS seal valves

Jeong, Ok Chan and Konishi, Satoshi (2008) Pneumatic gas regulator with cascaded PDMS seal valves. Sensors and Actuators A: Physical, 143 (1). 84 - 89.

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Official URL: http://www.sciencedirect.com/science/article/B6THG...

Abstract

This paper presents for the first time the pneumatic gas regulator with cascaded polydimethylsiloxane (PDMS) seal valves toward the miniaturization of the gas detection system. All PDMS gas regulator is fabricated through a soft lithography. The fabricated gas regulator is characterized under various operational conditions. The efficiencies of the static valve are estimated as a function of the introduced gas pressures. The valve efficiency of three valves is much higher that one of the single valve. Either when the gas input pressure is relatively smaller or when the control pressure for valves is higher, the valve efficiency is close to 100%. It will provide an effective method to control and rectify the highly pressurized gas by taking advantages of the cascaded rubber-seal valves. Moreover, PDMS gas regulator can be easily integrated with other essential components to develop the gas monitoring systems

Item Type:Article
Additional Information:Micromechanics Section of Sensors and Actuators (SAMM), based on contributions revised from the Technical Digest of the IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS 2007) - MEMS 2007, IEEE 20th International Conference on Micro Electro Mechanical Systems
Uncontrolled Keywords:Pneumatic; Gas regulator; Cascaded rubber-seal valves
Subjects:Analytical Science > Nanotechnology for sensing and actuating
ID Code:4920
Deposited By:SPI
Deposited On:09 Apr 2009 14:25
Last Modified:09 Apr 2009 14:25

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