Nano Archive

Miniaturized thermal flow sensor with planar-integrated sensor structures on semicircular surface channels

Dijkstra, M and de Boer, M. J. and Berenschot, J. W. and Lammerink, T. S. J. and Wiegerink, R. J. and Elwenspoek, M (2008) Miniaturized thermal flow sensor with planar-integrated sensor structures on semicircular surface channels. Sensors and Actuators A: Physical, 143 (1). 1 - 6.

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Official URL: http://www.sciencedirect.com/science/article/B6THG...

Abstract

A calorimetric miniaturized flow sensor was realized with a linear sensor response measured for water flow up to flow rates in the order of 300 nl min−1. A versatile technological concept is used to realize a sensor with a thermally isolated freely suspended silicon-rich silicon-nitride microchannel directly below the substrate surface. The microchannel concept allows for the planar integration of sensor structures in close proximity to the fluid, while chemical-resistant fluidic connections can be made directly on top of the microchannel, without introducing large dead-volumes. The realized flow sensor consists of a microchannel with low hydraulic resistance and 4.5 nl total fluid volume. A pressure driven flow setup was used to force water through the microchannel, measuring output sensitivity in the order of 0.2 μV/(nl min−1) for flows up to 300 nl min−1. The measured sensor output is in close agreement with results obtained from both a detailed and an approximate numerical model of the sensor.

Item Type:Article
Additional Information:Micromechanics Section of Sensors and Actuators (SAMM), based on contributions revised from the Technical Digest of the IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS 2007) - MEMS 2007, IEEE 20th International Conference on Micro Electro Mechanical Systems
Uncontrolled Keywords:Micromachined calorimetric flow sensor; Microfluidics
Subjects:Analytical Science > Nanotechnology for sensing and actuating
ID Code:4914
Deposited By:SPI
Deposited On:09 Apr 2009 16:43
Last Modified:09 Apr 2009 16:43

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