Goericke, Fabian and Lee, Jungchul and King, William P. (2008) Microcantilever hotplates with temperature-compensated piezoresistive strain sensors. Sensors and Actuators A: Physical, 143 (2). 181 - 190.
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Official URL: http://www.sciencedirect.com/science/article/B6THG...
This paper describes the design, fabrication, and characterization of microcantilever hotplates having both a resistive heater and temperature-compensated piezoresistive strain gauges. The heater was defined near the cantilever free end and the piezoresistive strain gauges were integrated near the clamped base. To realize temperature compensation, a pair of identical piezoresistors was defined in close proximity. One piezoresistor was aligned to the 1 1 0 crystal direction where the piezoresistive coefficient is maximized and the other one was aligned to the 1 0 0 crystal direction where the piezoresistive coefficient is nearly zero. The fabricated devices exhibit excellent temperature compensation, with a 20× reduction in temperature sensitivity. The deflection sensitivity shifted only 10% for heating to 200 °C and cantilever deflection 10 μm. This work enables cantilever strain sensors that could measure temperature-dependant phenomena.
|Uncontrolled Keywords:||Heater; Hotplate; Microcantilever; Piezoresistor; Temperature compensation|
|Subjects:||Analytical Science > Nanotechnology for sensing and actuating|
|Deposited On:||09 Apr 2009 18:44|
|Last Modified:||09 Apr 2009 18:44|
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