Nano Archive

Small absolute distance measurement with nanometer resolution using geometrical optics principles and a SPR angular sensor

Chiu, Ming-Hung and Shih, Bo-Yuan and Lai, Chih-Wen and Shyu, Lih-Horng and Wu, Tsung-Hsien (2008) Small absolute distance measurement with nanometer resolution using geometrical optics principles and a SPR angular sensor. Sensors and Actuators A: Physical, 141 (1). 217 - 223.

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Official URL: http://www.sciencedirect.com/science/article/B6THG...

Abstract

mall absolute distance measurement with nanometer resolution based on geometrical optics and the use of a surface plasmon resonance (SPR) sensor is presented. A Zeeman laser with two orthogonal polarizations is used, and a mirror is placed at the back focal plane of an objective lens. As the mirror or the objective lens undergoes a small displacement, the beam will converge or diverge into a SPR sensor, and the induced phase difference between the two marginal rays of the beam measured using a photodiode array and a lock-in amplifier is proportional to the departure of the mirror from the focal plane. Hence, the small absolute distance can be obtained in real-time.

Item Type:Article
Uncontrolled Keywords:Surface plasmon resonance (SPR); Small distance measurement; Heterodyne interferometry
Subjects:Analytical Science > Nanotechnology for sensing and actuating
Analytical Science > Metrology and standards in nanotechnology
ID Code:4901
Deposited By:SPI
Deposited On:09 Apr 2009 18:52
Last Modified:09 Apr 2009 18:52

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