Nano Archive

Drop ejection utilizing sideways actuation of a MEMS piston

Galambos, Paul and Czaplewski, Dave and Givler, Rick and Pohl, Kenneth R. and Luck, David L. and Benavides, Gilbert and Jokiel, Bernie (2008) Drop ejection utilizing sideways actuation of a MEMS piston. Sensors and Actuators A: Physical, 141 (1). 182 - 191.

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Official URL: http://www.sciencedirect.com/science/article/B6THG...

Abstract

A novel electrostatic sideways actuation drop dispenser (a sideshooter) is presented. The polysilicon Micro-Electro-Mechanical System (MEMS) drop dispenser is surface micromachined using the SUMMiT™ fabrication process. The dispenser was used to eject satellite free 0.25 pl drops of aqueous solution at 10 m/s using an 80 V pulse 10 μs long. The dispenser enables multiple liquid, viscosity, and drop size, integrated ejection microsystems; useful for wet nano-fabrication.

Item Type:Article
Uncontrolled Keywords:Drop ejector; Sideshooter; MEMS electrostatic actuator
Subjects:Analytical Science > Nanotechnology for sensing and actuating
Engineering > Nanotechnology applications in ICT
ID Code:4900
Deposited By:SPI
Deposited On:09 Apr 2009 18:56
Last Modified:09 Apr 2009 18:56

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