Galambos, Paul and Czaplewski, Dave and Givler, Rick and Pohl, Kenneth R. and Luck, David L. and Benavides, Gilbert and Jokiel, Bernie (2008) Drop ejection utilizing sideways actuation of a MEMS piston. Sensors and Actuators A: Physical, 141 (1). 182 - 191.
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Official URL: http://www.sciencedirect.com/science/article/B6THG...
Abstract
A novel electrostatic sideways actuation drop dispenser (a sideshooter) is presented. The polysilicon Micro-Electro-Mechanical System (MEMS) drop dispenser is surface micromachined using the SUMMiT™ fabrication process. The dispenser was used to eject satellite free 0.25 pl drops of aqueous solution at 10 m/s using an 80 V pulse 10 μs long. The dispenser enables multiple liquid, viscosity, and drop size, integrated ejection microsystems; useful for wet nano-fabrication.
| Item Type: | Article |
|---|---|
| Uncontrolled Keywords: | Drop ejector; Sideshooter; MEMS electrostatic actuator |
| Subjects: | Analytical Science > Nanotechnology for sensing and actuating Engineering > Nanotechnology applications in ICT |
| ID Code: | 4900 |
| Deposited By: | SPI |
| Deposited On: | 09 Apr 2009 18:56 |
| Last Modified: | 09 Apr 2009 18:56 |
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