Lee, Ki Bang and Lin, Liwei and Cho, Young-Ho (2008) A closed-form approach for frequency tunable comb resonators with curved finger contour. Sensors and Actuators A: Physical, 141 (2). 523 - 529.
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Official URL: http://www.sciencedirect.com/science/article/B6THG...
Abstract
Frequency tunable comb resonators have been successfully designed and demonstrated based on a closed-form approach of a curved comb finger contour. Experimentally, the resonant frequency of a laterally driven comb resonator with 186 pairs of curved finger contour has been reduced by 55% from the initial frequency of 19 kHz under a bias voltage of 150 V. The corresponding effective stiffness has been decreased by 80% from the initial value of 2.64 N/m. This closed-form design approach could be extended to microsystems based on electrostatic comb-shape structures such as microaccelerometers, microgyroscopes, and micromechanical filters.
| Item Type: | Article |
|---|---|
| Uncontrolled Keywords: | Tunable resonator; Electrostatic force; Frequency tuning; Stiffness tuning; Microresonator; Surface micromachining; MEMS |
| Subjects: | Analytical Science > Nanotechnology for sensing and actuating |
| ID Code: | 4889 |
| Deposited By: | SPI |
| Deposited On: | 10 Apr 2009 06:36 |
| Last Modified: | 10 Apr 2009 06:36 |
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