Nano Archive

Temperature calibration of heated silicon atomic force microscope cantilevers

Nelson, B. A. and King, W. P. (2007) Temperature calibration of heated silicon atomic force microscope cantilevers. Sensors and Actuators A: Physical, 140 (1). 51 - 59.

Full text is not hosted in this archive but may be available via the Official URL, or by requesting a copy from the corresponding author.

Official URL:


This article presents calibration techniques for heated silicon atomic force microscope cantilevers and analyzes the accuracy of these techniques. A calibration methodology using Raman thermometry is presented and validated with heat transfer simulations and experimental measurements. Raman thermometry generates a calibration standard against which other techniques can be compared. Theoretical predictions of the cantilever temperature-dependent electrical properties do not by themselves provide accurate cantilever temperature calibration. Isothermal calibration is also insufficient. The temperature calibrations are stable with storage time and number of heating cycles, although an electrical ‘burn-in’ period is required to stabilize the cantilever response. These techniques for precise temperature calibration of heatable silicon cantilevers are required for applications where temperature must be carefully controlled, including surface science measurements and nano-manufacturing.

Item Type:Article
Uncontrolled Keywords:Thermal sensors
Subjects:Analytical Science > Microscopy and probe methods
Analytical Science > Nanotechnology for sensing and actuating
ID Code:4878
Deposited By:SPI
Deposited On:24 Apr 2009 15:14
Last Modified:24 Apr 2009 15:14

Repository Staff Only: item control page