Nano Archive

Micropressure sensor fabrication without problem of stiction for a wider range of measurement

Ko, H. S. and Liu, C. W. and Gau, C (2007) Micropressure sensor fabrication without problem of stiction for a wider range of measurement. Sensors and Actuators A: Physical, 138 (1). 261 - 267.

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Official URL: http://www.sciencedirect.com/science/article/B6THG...

Abstract

The objective of this paper is to present a novel fabrication process for one or arrays of micropressure sensors. The fabrication process is almost the reverse of the surface micromachining process used for the pressure sensor. This allows the use of SU-8 to form cavity that can be much deeper for pressure measurement. Thus, the sensor made can provide a much wider range of pressure measurement. The fabrication process allows arrays of pressure sensors integrated into a complicated microchannel system for detailed pressure flow measurements. The fabrication process has completely absence of diaphragm stiction. Theoretical analysis for the stress and deformation of the pressure sensor diaphragm is derived and used for diaphragm design calculation. More detailed design and fabrication techniques developed for this sensor is presented.

Item Type:Article
Uncontrolled Keywords:Pressure sensor; Integrated device fabrication; Pressure sensor arrays; Microfabrication
Subjects:Material Science > Nanofabrication processes and tools
Analytical Science > Nanotechnology for sensing and actuating
ID Code:4872
Deposited By:SPI
Deposited On:24 Apr 2009 17:23
Last Modified:24 Apr 2009 17:23

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